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the physics of submicron lithography
Valiev (Author)
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the physics of submicron lithography - valiev
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Origin: U.S.A.
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Synopsis "the physics of submicron lithography"
this monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and x-ray lithography. topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.
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The book is written in English.
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