Share
A User's Guide to Ellipsometry (Dover Civil and Mechanical Engineering)
Harland G. Tompkins
(Author)
·
Dover Publications
· Paperback
A User's Guide to Ellipsometry (Dover Civil and Mechanical Engineering) - Tompkins, Harland G.
Choose the list to add your product or create one New List
✓ Product added successfully to the Wishlist.
Go to My Wishlists
Origin: U.S.A.
(Import costs included in the price)
It will be shipped from our warehouse between
Tuesday, June 11 and
Thursday, June 27.
You will receive it anywhere in United Kingdom between 1 and 3 business days after shipment.
Synopsis "A User's Guide to Ellipsometry (Dover Civil and Mechanical Engineering)"
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry -- particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
- 0% (0)
- 0% (0)
- 0% (0)
- 0% (0)
- 0% (0)
All books in our catalog are Original.
The book is written in English.
The binding of this edition is Paperback.
✓ Producto agregado correctamente al carro, Ir a Pagar.