Name: aluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfac
Price: 56.44 GBP
Availability: InStock
Author: charlee fansler
ISBN: 9783836469722

portada aluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfac

Type

Physical Book

Publisher

unknown

Author

charlee fansler

ISBN

3836469723

ISBN13

9783836469722

Synopsis "aluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfac"

aluminum nitride (aln) thin films can be used for many device applications; for example, surface acoustic wave (saw) devices, microelectromechanical systems (mems) applications, and packaging applications. in this work, aln is the critical layer in th ...